Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

In this study, Copper Indium Gallium Selenide (CIGS) thin films were successfully sputtered from a single quaternary target onto soda lime glass substrates. The effect of the incident angle atoms and sputter temperature on properties examined using various techniques. It was found that higher resulted in columnar microstructure, while lower produced solid film. structure showed improved optical absorption compared to had greater crystalline films, with all except those at room showing polycrystalline formation. displayed chalcopyrite acceptable band gaps range 1.1-1.3 eV, regardless temperature. These results indicate CIGS can be by small increase atoms, without adversely affecting structural properties.